My system is:
The last rinse is a bath of distilled water, with a few drops of wetting agent. I don't squeegee any film (just imagine what would happen if you have a little speck of dust in there somewhere...), but hang it to dry in a tall, narrow (closed) cupboard. Before hanging the film in there, I wipe down the inside of the cupboard with a wet cloth, to get rid of any dust that might be lurking in there.
I never have scratches (knock wood!), nor water marks or other problems.