A quick list off the top of my head

Late 19th early 20th c.

Julia Margaret Cameron
Gertrude Kasebier
Chansonetta Stanley Emmons

Mid 20th c.

Helen Levitt
Diane Arbus
(I'm sure there's more, but I can't think of any at the moment)

more contemporary

Debbie Fleming Caffery
Andrea Modica
Sally Mann
Susan Meiselas
Lauren Greenfield
Joyce Tenneson
Annie Liebowitz
Donna Ferrato

A couple of women who shoot for National Geographic

Jodi Cobb
Joanna Pinneo

I'm sure there are a lot more names to add!! Women have done quite well in this field, thank you very much!